4. Etching a substrate: processes
  5. Gas phase etching of substrate
  6. Application of energy to the gaseous etchant or to the...

Iqbal Shareef

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Method and apparatus for shaping gas profile near bevel edge

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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Sloped chamber top for substrate processing

Electric resistance heating devices – Heating devices – Radiant heater
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Profile ID: LFUS-PAI-P-2333549

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