4. Chemistry: electrical and wave energy
  5. Processes and products
  6. Coating, forming or etching by sputtering

IMS Ionen-Mikrofabrikations Systeme GmbH

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Lithographic method for producing an exposure pattern on a...

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Process for producing a carbon film on a substrate

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Patent

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