4. Fluid handling
  5. With heating or cooling of the system

Imad Yousif

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Apparatus and methods for controlling process chamber pressure

Fluid handling – With heating or cooling of the system
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Method and apparatus for optical detection of effluent...

Optics: measuring and testing – With plural diverse test or art
Reexamination Certificate

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Process for wafer backside polymer removal and wafer front...

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
Reexamination Certificate

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Process for wafer backside polymer removal with a ring of...

Cleaning and liquid contact with solids – Processes – Including application of electrical radiant or wave energy...
Reexamination Certificate

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Profile ID: LFUS-PAI-P-1840329

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