4. Optics: measuring and testing
  5. Position or displacement

Ilya Chizhov

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Fast wafer positioning method for optical metrology

Optics: measuring and testing – By alignment in lateral direction – With light detector
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System and method for finding the center of rotation of an...

Optics: measuring and testing – Position or displacement
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2791964

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