4. Radiant energy
  5. Inspection of solids or liquids by charged particles
  6. Analyte supports

Ibis Technology, Inc.

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SIMOX using controlled water vapor for oxygen implants

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Implanting to form insulator
Reexamination Certificate

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Wafer holder for simox processing

Radiant energy – Inspection of solids or liquids by charged particles – Analyte supports
Reexamination Certificate

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