4. Etching a substrate: processes
  5. Gas phase etching of substrate
  6. Etching inorganic substrate

Ian Sturland

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Angular velocity sensor with vibrator having ring portion...

Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect
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Method of manufacturing a vibrating structure gyroscope

Etching a substrate: processes – Gas phase etching of substrate – Etching inorganic substrate
Reexamination Certificate

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