Angular velocity sensor with vibrator having ring portion...

Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect

Reexamination Certificate

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Details

C073S504120

Reexamination Certificate

active

07637156

ABSTRACT:
A vibrator10, which is formed in a silicon wafer1by means of MEMS technique, has eight beam portions (beams)12supported at a central portion11and extending in the radial direction while mutually keeping the same angle and has a ring portion13connected to the eight beam portions12. Outside the ring portion13, eight electrodes21ato21hfor electrostatic actuation, capacitance detection, or the like are spaced uniformly with a gap22created between the ring portion13and the electrodes21ato21h. Inside the ring portion13, sixteen electrodes23for frequency adjustment are spaced uniformly with a gap24created between the ring portion13and the electrodes23.

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patent: WO-03/025502 (2003-03-01), None
patent: WO-03/078302 (2003-09-01), None
C. Fell, et al., A Second Generation Silicon Ring Gyroscope, Symposium Gyro Technology, 1999.
B.J. Gallacher, et al., Electrostatic Tuning of a Micro-Ring Gyroscope.

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