Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect
Reexamination Certificate
2005-07-12
2009-12-29
Kwok, Helen C. (Department: 2856)
Measuring and testing
Speed, velocity, or acceleration
Angular rate using gyroscopic or coriolis effect
C073S504120
Reexamination Certificate
active
07637156
ABSTRACT:
A vibrator10, which is formed in a silicon wafer1by means of MEMS technique, has eight beam portions (beams)12supported at a central portion11and extending in the radial direction while mutually keeping the same angle and has a ring portion13connected to the eight beam portions12. Outside the ring portion13, eight electrodes21ato21hfor electrostatic actuation, capacitance detection, or the like are spaced uniformly with a gap22created between the ring portion13and the electrodes21ato21h. Inside the ring portion13, sixteen electrodes23for frequency adjustment are spaced uniformly with a gap24created between the ring portion13and the electrodes23.
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Araki Ryuta
Fell Christopher P.
Kawasaki Hiroshi
Kitamura Toru
Nakamura Koji
Atlantic Inertial Systems Limited
Darby & Darby P.C.
Kwok Helen C.
Sumitomo Precision Products
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