4. Semiconductor device manufacturing: process
  5. Including control responsive to sensed condition
  6. Optical characteristic sensed

Ian Robert Harvey

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In-situ corner rounding during oxide etch for improved plug fill

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Patent

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Integrated etch process for polysilicon/metal gate

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
Patent

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Integrated inductive components and method of fabricating...

Active solid-state devices (e.g. – transistors – solid-state diode – Integrated circuit structure with electrically isolated... – Passive components in ics
Reexamination Certificate

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Metallization technique for gate electrodes and local...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
Reexamination Certificate

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Method for achieving accurate SOG etchback selectivity

Semiconductor device manufacturing: process – With measuring or testing
Patent

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Profile ID: LFUS-PAI-P-467242

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