4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Hyung Gi Kim

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Copolymer resin, preparation thereof, and photoresist using...

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Radiation sensitive composition or product or process of making
Reexamination Certificate

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Method for forming a fine pattern in a semiconductor device

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Photoresist copolymer

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Radiation sensitive composition or product or process of making
Patent

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Polymer and a forming method of a micro pattern using the same

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Radiation sensitive composition or product or process of making
Reexamination Certificate

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Polymer and a forming method of a micro pattern using the same

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Post imaging treatment with particles
Reexamination Certificate

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Profile ID: LFUS-PAI-P-1132186

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