4. Cleaning and liquid contact with solids
  5. Processes
  6. Hollow work, internal surface treatment

Hyong-Soo Kim

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Filtering technique for CVD chamber process gases

Cleaning and liquid contact with solids – Processes – Hollow work – internal surface treatment
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Method of forming a mask pattern for fabricating a...

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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Method of manufacturing a semiconductor device

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2123344

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