4. Optics: measuring and testing
  5. Inspection of flaws or impurities
  6. Surface condition

Hyo-Hoo Kim

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Method for inspecting a polishing pad in a semiconductor...

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
Reexamination Certificate

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Method for measuring step difference in a semiconductor...

Optics: measuring and testing – Shape or surface configuration – By focus detection
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Profile ID: LFUS-PAI-P-2663198

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