4. Semiconductor device manufacturing: process
  5. Coating of substrate containing semiconductor region or of...
  6. Insulative material deposited upon semiconductive substrate

Huong Thanh Nguyen

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Externally excited torroidal plasma source with magnetic...

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With plasma generation means remote from processing chamber
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Interface with dielectric layer and method of making

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Method for cleaning a process chamber

Cleaning and liquid contact with solids – Processes – Using sequentially applied treating agents
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Method for performing fluorocarbon chamber cleaning to...

Cleaning and liquid contact with solids – Processes – Using sequentially applied treating agents
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Method for using bypass lines to stabilize gas flow and...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
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Profile ID: LFUS-PAI-P-2110149

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