4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Hun Cha

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Inductive-coupled plasma apparatus employing shield and...

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
Reexamination Certificate

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Method for manufacturing a shield for an inductively-couple...

Etching a substrate: processes – Gas phase etching of substrate – With measuring – testing – or inspecting
Reexamination Certificate

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Method of etching metallic film for semiconductor devices

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Patent

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Polishing head of a chemical mechanical polishing apparatus...

Abrading – Work holder – Vacuum
Reexamination Certificate

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Semiconductor device manufacturing system having means for reduc

Metal working – Barrier layer or semiconductor device making
Patent

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Profile ID: LFUS-PAI-P-321613

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