4. Abrading
  5. Machine
  6. Rotary tool

Huang-Yi Lin

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Chemical mechanical polishing apparatus

Abrading – Precision device or process - or with condition responsive... – By optical sensor
Reexamination Certificate

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Device for detecting abnormality in chemical-mechanical...

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With microwave gas energizing means
Reexamination Certificate

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Pad backer for polishing head of chemical mechanical...

Abrading – Machine – Rotary tool
Reexamination Certificate

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Pressure monitoring system for chemical-mechanical polishing

Abrading – Precision device or process - or with condition responsive... – With indicating
Reexamination Certificate

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Pressure suppression device for chemical mechanical...

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – For liquid etchant
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2088732

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