4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Combined with coating step

Hsin-Yi Tsai

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Double patterning strategy for contact hole and trench in...

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
Reexamination Certificate

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Method of forming a fluorocarbon polymer film on a substrate...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2333923

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