4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Horng-Wen Chen

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In-situ strip process for polysilicon etching in deep...

Cleaning and liquid contact with solids – Processes – Including application of electrical radiant or wave energy...
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In-situ strip process for polysilicon etching in deep...

Cleaning and liquid contact with solids – Processes – Including application of electrical radiant or wave energy...
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Method for initiating a helium alarm particle detector in a...

Electrical connectors – Interrelated connectors relatively movable during use – Universal movement
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Method for monitoring contaminating particles in a chamber

Chemistry: analytical and immunological testing – Optical result – Spectrum analysis
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Method to increase wafer utility by implementing deep trench...

Semiconductor device manufacturing: process – Semiconductor substrate dicing – Having specified scribe region structure
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Profile ID: LFUS-PAI-P-1286439

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