4. Chucks or sockets
  5. With magnetic or electrostatic means

Hitoshi Atari

Inventor

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Electrostatic chuck

Chucks or sockets – With magnetic or electrostatic means
Patent

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Electrostatic chuck

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Reexamination Certificate

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Profile ID: LFUS-PAI-P-1623708

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