4. Optical: systems and elements
  5. Deflection using a moving element
  6. Using a periodically moving element

Hiroyuki Washiyama

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Multi-exposure drawing method and apparatus therefor

Incremental printing of symbolic information – Light or beam marking apparatus or processes – Scan of light
Reexamination Certificate

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Multibeam scanning exposure device

Optical: systems and elements – Deflection using a moving element – Using a periodically moving element
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2098591

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