4. Semiconductor device manufacturing: process
  5. Coating with electrically or thermally conductive material
  6. To form ohmic contact to semiconductive material

Hiroshi Tsujimoto

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Etching method and etching apparatus

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant
Reexamination Certificate

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Method and apparatus for manufacturing semiconductor device,...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Profile ID: LFUS-PAI-P-3225432

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