4. Radiant energy
  5. Irradiation of objects or material
  6. Irradiation of semiconductor devices

Hiroshi Sawaragi

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Apparatus for processing and observing a sample

Radiant energy – Inspection of solids or liquids by charged particles – Electron microscope type
Reexamination Certificate

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Ion beam lithography system

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Patent

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Profile ID: LFUS-PAI-P-1752797

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