4. Chemistry: electrical and wave energy
  5. Apparatus
  6. Coating, forming or etching by sputtering

Haruhiro Kobayashi

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Method for preparing single layer carbon nano-tube

Chemistry: electrical and wave energy – Processes and products – Electrostatic field or electrical discharge
Patent

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Method of preparing film of carbon nano-tube and film of...

Electric lamp or space discharge component or device manufacturi – Process – Electrode making
Reexamination Certificate

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Sputtering apparatus

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
Patent

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Profile ID: LFUS-PAI-P-815282

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