Chemistry: electrical and wave energy
Apparatus
Coating, forming or etching by sputtering
Inventor
active
Friction fit target assembly for high power sputtering...
Low temperature sputter target bonding method and target...
Method of assembling target and backing plates
Sputter target design
Sputtering target with an insulating ring and a gap between...
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Profile ID: LFUS-PAI-P-1575476