4. Coating apparatus
  5. Gas or vapor deposition
  6. Chamber seal

Hao-Wei Chang

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Apparatus and method for sealing a vacuum chamber

Coating apparatus – Gas or vapor deposition – Chamber seal
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Selective electroplating method employing annular edge ring...

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Making electrical device
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Profile ID: LFUS-PAI-P-2128506

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