4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Hans Peter Mikelson

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Method for interconnecting magnetoresistive memory bits

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Process to form fine features using photolithography and...

Etching a substrate: processes – Forming or treating an article whose final configuration has...
Reexamination Certificate

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Process to pattern thick TiW metal layers using uniform and...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2750356

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