4. Chemistry: electrical and wave energy
  5. Apparatus
  6. Coating, forming or etching by sputtering

Hans Buchberger

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Machine for coating a substrate, and module

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
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Method of producing a thin-film system

Coating processes – Measuring – testing – or indicating – Thickness or uniformity of thickness determined
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Thin film disk with barrier layer

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Profile ID: LFUS-PAI-P-2221186

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