4. Electric heating
  5. Heating devices
  6. Combined with container, enclosure, or support for material...

Hamid Noorbakhsh

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Apparatus for measuring pedestal and substrate temperature...

Thermal measuring and testing – Temperature measurement – Combined with diverse art device
Reexamination Certificate

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Chamber having improved gas feed-through and method

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With microwave gas energizing means
Reexamination Certificate

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Chuck having pressurized zones of heat transfer gas

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Reexamination Certificate

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Controlling the temperature of a wafer by varying the pressure o

Electric heating – Heating devices – Combined with container – enclosure – or support for material...
Patent

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Dielectric etch chamber with expanded process window

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Profile ID: LFUS-PAI-P-1818705

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