4. Coating apparatus
  5. Gas or vapor deposition
  6. With treating means

Halsey H. Haselton

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Coupled microwave ECR and radio-frequency plasma source for plas

Coating apparatus – Gas or vapor deposition – With treating means
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Neutral beamline with improved ion energy recovery

Induced nuclear reactions: processes – systems – and elements – Nuclear fusion – Magnetic confinement of plasma
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Profile ID: LFUS-PAI-P-293965

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