4. Single-crystal, oriented-crystal, and epitaxy growth processes;
  5. Apparatus
  6. For crystallization from liquid or supercritical state

Hak-Do Yoo

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Apparatus for growing a single crystalline ingot

Single-crystal – oriented-crystal – and epitaxy growth processes; – Apparatus – For crystallization from liquid or supercritical state
Reexamination Certificate

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Single crystalline silicon wafer, ingot, and producing...

Single-crystal – oriented-crystal – and epitaxy growth processes; – Processes of growth from liquid or supercritical state – Having pulling during growth
Reexamination Certificate

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single crystalline silicon wafer, ingot, and producing...

Stock material or miscellaneous articles – Circular sheet or circular blank
Reexamination Certificate

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