4. Semiconductor device manufacturing: process
  5. Formation of electrically isolated lateral semiconductive...
  6. And gettering of substrate

Gun Kim

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Method of fabricating a silicon wafer including steps of...

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – And gettering of substrate
Reexamination Certificate

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Method of fabricating annealed wafer

Semiconductor device manufacturing: process – Radiation or energy treatment modifying properties of... – By differential heating
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