Chemistry: electrical and wave energy
Processes and products
Coating, forming or etching by sputtering
Inventor
active
Method for producing NiTiHf alloy films by sputtering
Production of binary shape-memory alloy films by sputtering...
Production of ternary shape-memory alloy films by sputtering...
Rotating film carrier and aperture for precision deposition...
Sputtering alloy films using a crescent-shaped aperture
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Profile ID: LFUS-PAI-P-2149766