4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Gregory D. U'ren

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Independent control of polycrystalline silicon-germanium in...

Active solid-state devices (e.g. – transistors – solid-state diode – Bipolar transistor structure – With base region having specified doping concentration...
Reexamination Certificate

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Technique for reducing contaminants in fabrication of...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2963712

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