4. Semiconductor device manufacturing: process
  5. Making device or circuit responsive to nonelectrical signal

Gregory Beach

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Conductive etch stop for etching a sacrificial layer

Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal
Reexamination Certificate

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Diffractive light modulator

Optical: systems and elements – Optical modulator – Light wave temporal modulation
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Profile ID: LFUS-PAI-P-2927283

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