4. Coating apparatus
  5. With means to centrifuge work

Greg Montanino

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Develop processing method of a resist surface of a substrate...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
Reexamination Certificate

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Develop processing method of a resist surface on a substrate...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
Reexamination Certificate

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Method for dispensing flowable substances on microelectronic...

Coating processes – Measuring – testing – or indicating
Reexamination Certificate

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Spin coating bowl

Coating apparatus – With means to centrifuge work
Utility Patent

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Spin coating bowl

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
Patent

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Profile ID: LFUS-PAI-P-1337992

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