4. Semiconductor device manufacturing: process
  5. With measuring or testing

Gowri P. Kota

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Methods for critical dimension control during plasma etching

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
Reexamination Certificate

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Process controls for improved wafer uniformity using...

Semiconductor device manufacturing: process – With measuring or testing
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2919365

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