4. Electricity: electrical systems and devices
  5. Electric charge generating or conducting means
  6. Use of forces of electric charge or field

Gordon Robert Green

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Deposition apparatus

Coating apparatus – Gas or vapor deposition – Having means to expose a portion of a substrate to coating...
Reexamination Certificate

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Plasma processing apparatus

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
Reexamination Certificate

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Platen for semiconductor workpieces

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Reexamination Certificate

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Shutter

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2146865

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