Chemistry: electrical and wave energy
Processes and products
Coating, forming or etching by sputtering
Inventor
active
Immersed inductively—coupled plasma source
Inductively-coupled plasma processing system
Ionized PVD with sequential deposition and etching
Method and apparatus for ionized physical vapor deposition
Method and apparatus for ionized physical vapor deposition
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Profile ID: LFUS-PAI-P-1129274