4. Coating apparatus
  5. Gas or vapor deposition
  6. Work support

Glenn A. Pfefferkorn

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Reflector apparatus for chemical vapor deposition reactors

Coating apparatus – Gas or vapor deposition – Work support
Patent

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Systems and methods for epitaxial processing of a...

Semiconductor device manufacturing: process – Formation of semiconductive active region on any substrate
Reexamination Certificate

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Profile ID: LFUS-PAI-P-1298696

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