4. Adhesive bonding and miscellaneous chemical manufacture
  5. Differential fluid etching apparatus
  6. With plasma generation means remote from processing chamber

Gerd Hintz

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RF plasma supply device

Electrical transmission or interconnection systems – Plural supply circuits or sources – One source floats across or compensates for other source
Reexamination Certificate

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Vacuum plasma generator

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With plasma generation means remote from processing chamber
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Profile ID: LFUS-PAI-P-3168732

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