4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Liquid phase etching

George F. Ouimet, Jr.

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Etching composition and use thereof

Semiconductor device manufacturing: process – Chemical etching – Liquid phase etching
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Method and apparatus for ozone generation and surface treatment

Cleaning and liquid contact with solids – Processes – Including application of electrical radiant or wave energy...
Reexamination Certificate

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Profile ID: LFUS-PAI-P-1725622

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