Active solid-state devices (e.g., transistors, solid-state diode
Responsive to non-electrical signal
Physical deformation
Inventor
active
Anti-stiction technique for electromechanical systems and...
Anti-stiction technique for electromechanical systems and...
Dual-axis yaw rate sensing unit having a tuning fork...
Dual-axis yaw rate sensing unit having a tuning fork...
In-plane mechanically coupled microelectromechanical tuning...
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