4. Coating processes
  5. Direct application of electrical, magnetic, wave, or...
  6. Ion plating or implantation

Gary Steven Tompa

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Method for producing carbon nitride films

Coating processes – Direct application of electrical – magnetic – wave – or... – Ion plating or implantation
Patent

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Plasma enhanced chemical vapor deposition system

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Profile ID: LFUS-PAI-P-1540495

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