4. Coating apparatus
  5. Gas or vapor deposition
  6. Multizone chamber

Gary S. Tompa

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Apparatus for depositing a coating on a substrate

Single-crystal – oriented-crystal – and epitaxy growth processes; – Forming from vapor or gaseous state – With decomposition of a precursor
Patent

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Apparatus for depositing a coating on a substrate

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

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Filament support arrangement for substrate heating apparatus

Electric heating – Heating devices – Combined with container – enclosure – or support for material...
Reexamination Certificate

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Fullene based sintered carbon materials

Chemistry of inorganic compounds – Carbon or compound thereof – Elemental carbon
Reexamination Certificate

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Multi-component substances and processes for preparation...

Coating processes – Direct application of electrical – magnetic – wave – or... – Pretreatment of coating supply or source outside of primary...
Reexamination Certificate

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Profile ID: LFUS-PAI-P-388002

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