4. Radiant energy
  5. Irradiation of objects or material
  6. Irradiation of semiconductor devices

Frank E. Abboud

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Dose modulation and pixel deflection for raster scan lithography

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Patent

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Low stress pellicle frames and reticle pellicle assemblies

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
Reexamination Certificate

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Profile ID: LFUS-PAI-P-1045218

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