4. Coating apparatus
  5. Gas or vapor deposition
  6. With treating means

Franco Preti

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Chemical vapor deposition epitaxial reactor having two...

Single-crystal – oriented-crystal – and epitaxy growth processes; – Apparatus
Reexamination Certificate

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Device and method for handling substrates by means of a...

Coating apparatus – Gas or vapor deposition – Multizone chamber
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Epitaxial reactors

Coating apparatus – Gas or vapor deposition – With treating means
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Reaction chamber for an epitaxial reactor

Coating apparatus – Gas or vapor deposition
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Reaction chamber for an epitaxial reactor

Coating apparatus – Gas or vapor deposition
Reexamination Certificate

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Profile ID: LFUS-PAI-P-1998820

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