4. Data processing: generic control systems or specific application
  5. Specific application, apparatus or process
  6. Product assembly or manufacturing

Frances Mary Ross

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Geometric phase analysis for mask alignment

Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Patent

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Geometric phase analysis for overlay measurement

Computer-aided design and analysis of circuits and semiconductor – Nanotechnology related integrated circuit design
Reexamination Certificate

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Silicate gate dielectric

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device
Reexamination Certificate

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Profile ID: LFUS-PAI-P-1217257

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