4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Evans Y Lee

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Dielectric etch chamber with expanded process window

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Dielectric etch chamber with expanded process window

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – Having glow discharge electrode gas energizing means
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2715175

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