4. Abrading
  5. Flexible-member tool, per se

Eugene Y. Zhao

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Apparatus for accurate endpoint detection in supported...

Abrading – Tool support for flexible-member tool – Manually manipulated
Reexamination Certificate

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Methods for making reinforced wafer polishing pads and...

Abrading – Flexible-member tool – per se
Reexamination Certificate

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Methods for making reinforced wafer polishing pads and...

Abrading – Flexible-member tool – per se – Laminate
Reexamination Certificate

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Methods for making reinforced wafer polishing pads utilizing...

Abrading – Flexible-member tool – per se
Reexamination Certificate

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