4. Active solid-state devices (e.g., transistors, solid-state diode
  5. With means to control surface effects
  6. Insulating coating

Eric Seung Lee

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active

Dual layer etch stop barrier

Active solid-state devices (e.g. – transistors – solid-state diode – With means to control surface effects – Insulating coating
Reexamination Certificate

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Dual layer etch stop barrier

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Dual layer etch stop barrier

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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