4. Coating processes
  5. Electrical product produced
  6. Integrated circuit, printed circuit, or circuit board

Eric A. Powell

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Process for forming highly conformal dielectric coatings in the

Coating processes – Electrical product produced – Integrated circuit – printed circuit – or circuit board
Patent

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Temperature controlled anode for plasma dry etchers for etching

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
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Profile ID: LFUS-PAI-P-1524408

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