4. Optics: measuring and testing
  5. Angle measuring or angular axial alignment
  6. Photodetection of inclination from level or vertical

Elke Van Loenhout

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Lithographic apparatus and method for manufacturing a device

Photocopying – Projection printing and copying cameras – With temperature or foreign particle control
Reexamination Certificate

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Method for correcting disturbances in a level sensor light path

Optics: measuring and testing – Angle measuring or angular axial alignment – Photodetection of inclination from level or vertical
Reexamination Certificate

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Profile ID: LFUS-PAI-P-3152165

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